TED Member States· European UniontenderRequest by · 06 Nov 2026
Request to participate
Automatic Optical Inspection Equipment 300mm
CEA GRENOBLE
Requests to participate by 06 Nov 2026Requests to participate by06 Nov 2026
CPV category31712000
Published16 Oct 2026
Reference725375-2026
Notice summary
For its research activities aimed at developing FD-SOI 10 nm technologies and beyond, CEA-LETI wishes to acquire a 300mm equipment for front-side optical inspection, capable of detecting defects of a minimum size of 300nm for microscopic inspection, and defect sizes greater than 10µm for macroscopic inspection. The equipment must be equipped with several optical lenses and be able to process 200mm and 300mm plates of variable thickness. It must be able to process files in the…
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